Microstructure and mechanical properties of nanolayered TiN/Cu thin films

Materials Research Society Symposium - Proceedings

Volumn 778, Issue , 2003, Pages 183-188

  Tse, Y Y ^a   Abadias, G ^a   Michel, A ^a   Tromas, C ^a   Jaouen, M ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; CRYSTAL MICROSTRUCTURE; HARDNESS; INDENTATION; INTERFACES (MATERIALS); ION BEAMS; SPUTTERING; THIN FILMS; TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

DEPTH-SENSING NANOINDENTATION TECHNIQUE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; ION BEAM SPUTTERING; SOFTWARE PACKAGE SUPREX;

NANOSTRUCTURED MATERIALS;

EID: 0346937635     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-778-u6.8     Document Type: Conference Paper

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