Electrical resistivity of RF sputtered Pd films

Physics Letters, Section A: General, Atomic and Solid State Physics

Volumn 319, Issue 5-6, 2003, Pages 555-559

  Shi, Y S ^a  

^a YANCHENG TEACHERS UNIVERSITY   (China)

Author keywords

Electrical resistivity; Pd films

Indexed keywords

PD FILM; SIZE EFFECTS; SPUTTERING CONDITIONS; SUBSTRATE TEMPERATURE EFFECT;

ELECTRIC CONDUCTIVITY;

PALLADIUM;

ARTICLE; CRYSTAL; ELECTRIC RESISTANCE; FILM; MATHEMATICAL ANALYSIS; THICKNESS; X RAY;

EID: 0346902236     PISSN: 03759601     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.physleta.2003.11.002     Document Type: Article

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