Electronic stopping powers for heavy ions in silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 215, Issue 1-2, 2004, Pages 48-56

  Zhang, Yanwen ^a   Weber, William J ^a   Whitlow, Harry J ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b LUND INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

Elastic recoil detection analysis; Energy loss; Si detector; Stopping power; Time of flight

Indexed keywords

ENERGY DISSIPATION; EXTRAPOLATION; INTEGRATED CIRCUITS; ION BEAMS; ION IMPLANTATION; LIQUID CRYSTAL DISPLAYS; NUCLEAR PHYSICS; POLYNOMIALS; PROBABILITY; RADIATION DAMAGE; RADIOTHERAPY; SILICON; THIN FILMS;

ELASTIC RECOIL DETECTION ANALYSIS (ERDA); STOPPING POWER;

HEAVY IONS;

EID: 0346394053     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2003.09.005     Document Type: Article

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