Interfacial relationships in microelectronic devices

Materials Research Society Symposium - Proceedings

Volumn 766, Issue , 2003, Pages 153-164

  Lane, Michael ^a   Rosenberg, Robert ^a  

^a IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MECHANICAL POLISHING; INTERFACES (MATERIALS); MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; SEMICONDUCTOR DEVICE STRUCTURES;

BACK END OF THE LINE DEVICES; INTERCONNECT STRUCTURES; INTERFACE BONDING; MICROELECTRONIC DEVICES;

COPPER;

EID: 0346308402     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-766-e9.1     Document Type: Conference Paper

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