Tele-micro machining system with operational environment transmission under a stereo-SEM

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 1996, Pages 2194-2201

  Mitsuishi, Mamoru ^a   Sugita, Naohiko ^a   Nagao, Takaaki ^a   Hatamura, Yotaro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL THEORY; DEGREES OF FREEDOM (MECHANICS); ELECTRIC CURRENTS; FEEDBACK; MAGNETIC LEVITATION; MAGNETS; MICROMACHINING; MICROPHONES; SCANNING ELECTRON MICROSCOPY; THREE DIMENSIONAL; THREE TERM CONTROL SYSTEMS; TRACKING (POSITION);

FORCE FEEDBACK; LORENTZ MAGNETIC LEVITATION; MICRO CUTTING; OPERATIONAL ENVIRONMENT TRANSMISSION; PIEZOELEMENTS; STEREO SCANNING ELECTRON MICROSCOPY; TELEMICRO MACHINING SYSTEM; THREE AXIS FORCE SENSING TABLE; THREE DIMENSIONAL MECHANICAL PARTS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029695035     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)