Planarization of diamond thin film surfaces by ion beam etching at grazing incidence angle

Diamond and Related Materials

Volumn 5, Issue 6-8, 1996, Pages 835-839

  Ilias, S ^a   Sene G ^a   Moller P ^a   Stambouli, V ^a   Pascallon, J ^a   Bouchier, D ^a   Gicquel, A ^b   Tardieu, A ^b   Anger, E ^b   Ravet, M F ^a  

^a CNRS   (France)

^b UNIVERSITÉ PARIS 13   (France)

Author keywords

Angle; Diamond; Etching

Indexed keywords

EID: 0001078930     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/0925-9635(95)00412-2     Document Type: Article

References (11)

1. M.F. Ravet, A. Gicquel, E. Anger, Z.Z. Wang, Y. Chen and F. Rousseaux, 2nd Int. Conf. on the Applications of Diamond Films and Related Materials, MYU, Tokyo 1993.
2. H. Tokura and M. Yoshikawa, in Y. Tzeng, M. Yoshikawa, M. Murakawa and A. Feldman (eds.), Applications of Diamond Films and Related Materials, Elsevier, New York, 1991, p. 241.
3. T.J. Whetten, A.A. Armstead, T.A. Grzybowski and A.L. Ruoff, J. Vac. Sci. Technol. A, 2 (1984) 477.
4. C. Vivensang, L. Manin-Ferlazzo, M.F. Ravet, F. Rousseaux, G. Turban and A. Gicquel, 10th Int. Conf. on Plasma Processes, SFV Proc., Antibes, 1995.
5. Yoshikawa, SPIE Proc., 1325 (1990) 210.
6. N.N. Efremow, M.W. Geis, D.C. Flanders, G.A. Lincoln and N.P. Economou, J. Vac. Sci. Technol. B, 3 (1985) 416.
7. B.G. Bovard, T. Zhao and H.A. MacLeod, SPIE Proc., 1534 (1991) 216
8. A. Gicquel, E. Anger, M.F. Ravet, D. Fabre, G. Scatena and Z.Z. Wang, Diamond Relat. Mater., 2 (1993) 417.
9. O. Burat, D. Bouchier, V. Stambouli and G. Gautherin, J. Appl. Phys., 68 (1990) 2780.
10. W. Möller, W. Eckstein and J.P. Biersack, Comp. Phys. Commun., 51 (1988) 355.
11. Eric Anger, Ph.D. thesis, May 1994, LIMHP-Villetaneuse.