Preparation of polycrystalline Ti-Al-O films by magnetron sputtering ion plating: Constitution, structure and morphology

Fresenius' Journal of Analytical Chemistry

Volumn 358, Issue 1-2, 1997, Pages 308-311

  Von Richthofen, Alexander ^a   Cremer, Rainer ^a   Domnick, Ralph ^a   Neuschütz, Dieter ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0346064127     PISSN: 09370633     EISSN: None     Source Type: Journal    
DOI: 10.1007/s002160050414     Document Type: Article

References (8)

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