Coherent X-ray imaging investigation of macrodefects and micropipes on SiC

Materials Science and Engineering: B

Volumn 61-62, Issue , 1999, Pages 63-67

  Milita, S ^a   Madar, R ^b   Baruchel, J ^a   Anikin, M ^b   Argunova, T ^c  

^a EUROPEAN SYNCHROTRON RADIATION FACILITY   (France)

^b CNRS   (France)

^c IOFFE INSTITUTE   (Russian Federation)

Author keywords

Defects on SiC; X ray phase image

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; SEMICONDUCTING SILICON COMPOUNDS; X RAY ANALYSIS;

MACRODEFECTS; MICROPIPES; X RAY PHASE IMAGING;

SILICON CARBIDE;

X-RAY;

EID: 0346043179     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00446-2     Document Type: Article

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