A novel structural VO2 micro-optical switch

Optical and Quantum Electronics

Volumn 35, Issue 15, 2003, Pages 1351-1355

  Chen, S ^a   Yi, X ^a   Ma, H ^a   Wang, H ^a   Tao, X ^a   Chen, M ^a   Ke, C ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Optical switches; Reactive ion sputtering; Vanadium dioxide thin films

Indexed keywords

ANNEALING; EQUIPMENT TESTING; ION BEAMS; SEMICONDUCTING SILICON; SPUTTERING; SUBSTRATES; THIN FILMS; VANADIUM COMPOUNDS;

MICRO-OPTICAL SWITCH; REACTIVE ION SPUTTERING; VANADIUM DIOXIDE THIN FILMS;

OPTICAL SWITCHES;

EID: 0346007911     PISSN: 03068919     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:OQEL.0000009429.14136.3d     Document Type: Article

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