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Volumn 85, Issue 3, 1999, Pages 1531-1539

Suicide formation in the Ta/Ti/Si system by reaction of codeposited Ta and Ti with Si (100) and Si (111) substrates

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0345916318     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369283     Document Type: Article
Times cited : (7)

References (41)
  • 7
    • 0346979537 scopus 로고
    • JCPDS-ICDD-International Center for Diffraction Data, Swarthmore, PA
    • Powder diffraction file, card 38-483, JCPDS-ICDD-International Center for Diffraction Data, Swarthmore, PA, 1991.
    • (1991) Powder Diffraction File, Card 38-483
  • 10
    • 0042194824 scopus 로고
    • edited by R. J. Nemanich, P. S. Ho, and S. S. Lau Materials Research Society, Pittsburgh
    • H. J. van Houtum and I. J. M. M. Raaijmakers, in Thin Films-Interfaces and Phenomena, edited by R. J. Nemanich, P. S. Ho, and S. S. Lau (Materials Research Society, Pittsburgh, 1986), Vol. 54, p. 37.
    • (1986) Thin Films-Interfaces and Phenomena , vol.54 , pp. 37
    • Van Houtum, H.J.1    Raaijmakers, I.J.M.M.2
  • 15
    • 0003427460 scopus 로고
    • Addison-Wesley, Reading
    • B. D. Cullity, X-Ray Diffraction (Addison-Wesley, Reading, 1956), p. 459.
    • (1956) X-Ray Diffraction , pp. 459
    • Cullity, B.D.1
  • 35
    • 0001582408 scopus 로고
    • edited by K. Maex and M. van Rossum Inspec. London
    • M. Setton, in Properties of Metal Silicides, edited by K. Maex and M. van Rossum (Inspec. London, 1995), p. 129.
    • (1995) Properties of Metal Silicides , pp. 129
    • Setton, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.