The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmas

Physics of Plasmas

Volumn 6, Issue 5 I, 1999, Pages 2307-2313

  Brake, M L ^a   Pender, J ^a,b   Fournier, J ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b APPLIED MATERIALS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345910771     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873482     Document Type: Article

References (19)

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