Local order studies of C-rich amorphous silicon-carbon thin films

Journal of Non-Crystalline Solids

Volumn 227-230, Issue PART 1, 1998, Pages 447-451

  Senemaud C ^a   Gheorghiu de La Rocque, A ^a   Bonnefont, P A ^a   Heitz, T ^b   Godet, C ^b   Bouree J E ^b  

^a Laboratoire de Chimie Physique   (France)

^b LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

Amorphous carbon; Electronic structure; Local order; Silicon carbon alloys

Indexed keywords

AMORPHOUS FILMS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; ELECTRON ENERGY LEVELS; ELECTRONIC STRUCTURE; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; X RAY PHOTOELECTRON SPECTROSCOPY;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING FILMS;

EID: 0345884688     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(98)00087-8     Document Type: Article

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