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Volumn , Issue 1413, 2001, Pages
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Mechanical Properties of Structural Films
[No Author Info available]
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTUATORS;
AMORPHOUS ALLOYS;
DIAMONDS;
FATIGUE OF MATERIALS;
MAGNETRON SPUTTERING;
MECHANICAL TESTING;
MICROELECTROMECHANICAL DEVICES;
MICROELECTRONICS;
MICROSTRUCTURE;
NICKEL ALLOYS;
PHYSICAL VAPOR DEPOSITION;
PIEZOELECTRIC MATERIALS;
POLYSILICON;
SURFACE TOPOGRAPHY;
TENSILE STRENGTH;
TUNGSTEN PLATING;
BULGE TESTING;
CRACK NUCLEATION;
EIREV;
INTERFACIAL CRACKING;
MONOTONIC LOADING;
OPTICAL ENCODERS;
PIEZOELECTRIC MEMBRANES;
SI MEMS;
STANDARD DEVIATION;
STRENGTH DISTRIBUTION;
THIN FILMS;
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EID: 84920633964
PISSN: 00660558
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Review |
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Times cited : (3)
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References (0)
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