Ti/TiOx Single-Electron Devices Produced with a Step-Edge-Cut-off (SECO) Method

Russian Microelectronics

Volumn 29, Issue 3, 2000, Pages 189-196

  Litvin, L V ^a   Kolosanov, V A ^a   Mogil'nikov, K P ^a   Cherkov, A G ^a   Baksheev, D G ^a   Tkachenko, V A ^a   Aseev, A L ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0345756153     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: 10.1007/bf02773257     Document Type: Article

References (10)

1. Fulton, T.A. and Dolan, G.J., Observation of Single-Electron Charging Effects in Small Tunnel Junctions, Phys. Rev. Lett., 1987, vol. 59, p. 109.
2. Altmeyer, S., Spangenberg, B., and Kurz, H., A New Concept for the Design and Realization of Metal Based Single Electron Devices: Step Edge Cut-Off, Appl. Phys. Lett., 1995, vol. 67, no. 4, p. 569.
3. Altmeyer, S., Kühnel, F., Spangenberg, B., and Kurz, H., A Possible Road to 77 K Single Electron Devices, Semicond. Sci. Technol., 1996, vol. 11, p. 1502.
4. Langheinrich, W. and Ahmed, H., Fabrication of Lateral Tunnel Junctions and Measurement of Coulomb Blockade Effects, Jpn. J. Appl. Phys., 1995, vol. 34, p. 6956.
5. Matsumoto, K., Takahashi, S., Ishii, M., Hoshi, M., Kurokawa, A., Ichimura, S., and Ando, A., Application of STM Nanometer-Size Oxidation Process to Planar-Type MIM Diode, Jpn. J. Appl. Phys., 1995, vol. 34, p. 1387.
6. x Tunneling Barriers by Tapping Mode Atomic Force Microscopy Induced Local Oxidation, Appl. Phys. Lett., 1997, vol. 71, no. 12, p. 1733.
7. x/Ti System, Appl. Phys. Lett., 1996, vol. 68, no. 1, p. 34.
8. Snow, E.S., Campbell, P.M., Rendell, R.W., Buot, F.A., Park, D., Marrian, C.R.K., and Magno, R., A Metal/Oxide Tunneling Transistor, Semicond. Sci. Technol., 1998, vol. 13, p. A75.
9. Laiko, E.I., Orlov, A.O., Savchenko, A.K., Il'ichev, E.A., and Poltoratskii, E.A., Negative Magnetoresistance and Oscillating Hopping Conduction in a Short Channel of a GaAs MESFET, Zh. Tekh. Fiz., 1987, vol. 93, p. 2204.
10. Averin, D.V. and Likharev, K.K., Coherent Oscillations in Small-Size Tunnel Junctions, Zh. Tekh. Fiz., 1986, vol. 90, p. 733.