Microtribology of Magnetic Thin Films with Complex Surface Modification of Nitrogen-Plasma Irradiation and Nitrogen Containing Carbon Film Deposition

Toraibarojisuto/Journal of Japanese Society of Tribologists

Volumn 43, Issue 11, 1998, Pages 979-986

  Miyake, Shojiro ^a   Sekine, Yukio ^a   Shinogi, Norio ^b   Watanabe, Shuichi ^a  

^a NIPPON INSTITUTE OF TECHNOLOGY   (Japan)

^b Daiichi kasei Co Ltd   (Japan)

Author keywords

Carbon nitride film; Hardness; Magnetic hard disk; Microtribology; Plasma surface modification; Protective layer; Sputtering

Indexed keywords

EID: 0345735124     PISSN: 09151168     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

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