RF-sputtered amorphous CNx for contact recording applications

American Society of Mechanical Engineers, Tribology Division, TRIB

Volumn 6, Issue , 1996, Pages 33-38

  White, Richard L ^a   Bhatia, Surinder S ^a   Meeks, Steve W ^b   Friedenberg, Matthew C ^c   Mate, C Matthew ^d  

^a IBM   (United States)

^b MAXTOR CORPORATION   (United States)

^c Gen Probe Incorporated   (United States)

^d IBM ALMADEN RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; BONDING; CARBON; LIGHT REFLECTION; MAGNETIC RECORDING; MAGNETRON SPUTTERING; NITROGEN; SILICON WAFERS; SUBSTRATES; TRIBOLOGY; X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON NITROGEN BONDING; CONTACT RECORDING; OPTICAL SURFACE ANALYZER; PIN ON DISK SCRATCH TESTING;

MAGNETIC FILMS;

EID: 0030381968     PISSN: None     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (14)

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