Four-dimensional microscopy of defects in integrated circuits

Applied Optics

Volumn 42, Issue 32, 2003, Pages 6520-6524

  Miranda, Jelda Jayne ^a   Saloma, Caesar ^a  

^a University of the Philippines ^*  (Philippines)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; FAILURE ANALYSIS; IMAGE ANALYSIS; IMAGE RECONSTRUCTION; IMAGING SYSTEMS; MICROSCOPES; SCANNING;

LASER-SCANNING CONFOCAL MICROSCOPES;

INTEGRATED CIRCUIT TESTING;

EID: 0345446580     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.006520     Document Type: Article

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