Optical properties of immersion objective lenses and collimation of secondary electrons in low-voltage SEM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2858, Issue , 1996, Pages 46-57

  Tsuno, Katsushige ^a   Handa, Nobuo ^a   Matsumoto, Sunao ^a   Mogami, A ^a  

^a JEOL LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COLLIMATION; IMMERSION OBJECTIVE LENSES; SECONDARY ELECTRONS;

ABERRATIONS; ELECTRIC FIELDS; MAGNETIC FIELDS; MAGNETIC LENSES; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY;

ELECTRON LENSES;

EID: 0030419938     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (15)