Air flow modeling and testing of 300 mm minienvironment/load port systems

Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

Volumn , Issue , 1998, Pages 411-418

  Schneider, Heinz ^a   Fabian, Peter ^a   Sczepan, Rita ^a   Hollemann, Susanne ^a   Honold, Alfred ^a  

^a JENOPTIK INFAB   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL FLUID DYNAMICS; CONTAMINATION; PARTICLE SIZE ANALYSIS; PARTICLES (PARTICULATE MATTER);

FRONT OPENING UNIFIED POD; LOAD PORT SYSTEM; PARTICLE MEASUREMENT;

ENVIRONMENTAL TESTING;

EID: 0031617932     PISSN: 00739227     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)