Carbon-based composite thin films for use as microelectrode

Materials Chemistry and Physics

Volumn 82, Issue 3, 2003, Pages 567-570

  Lee, H L ^a   Ting, Jyh Ming ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Composite; Diamond like carbon; Platinum; Thin film

Indexed keywords

COMPOSITE MATERIALS; DIAMOND LIKE CARBON FILMS; ELECTRIC CONDUCTIVITY; MICROELECTRODES; PLATINUM; SPUTTER DEPOSITION; SURFACES;

SPUTTER GAS;

THIN FILMS;

EID: 0344515432     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(03)00313-4     Document Type: Article

References (15)

1. Aisenburg S., Chabot R. J. Appl. Phys. 42:1971;2950.
2. Wild C., Koidi P. Appl. Phys. Lett. 51:1987;1506.
3. Kakuchi M., Hikita M., Tamamura T. Appl. Phys. Lett. 48:1986;835.
4. Jiang X., Reichelt K., Stritzker B. J. Appl. Phys. 68(3):1990;1018.
5. Dimigen H., Hubsch H. Phillips Tech. Rev. 41:1983;186.
6. Li L.F. J. Am. Chem. Soc. 119:1997;7875.
7. Cluche P. MST News. 21:1997;14.
8. Jacques S., Guette A., Bourrat X., Langlais F., Guimon C., Labrugere C. LPCVD and characterization of boron-containing pyrocarbon material. Carbon. 34:1996;1135-1143.
9. Knight D.S., White W.B. J. Mater. Res. 4:1989;385-393.
10. Mounier E., Bertin F., Adamik M., Pauleau Y., Barna P.B. Dia. Rel. Mater. 5:1996;1509-1515.
11. Oral B., Hauert R., Muller U., Ernst K.-H. Dia. Rel. Mater. 4:1995;482-487.
12. Porkolab G.A., Wolf E.D. J. Vac. Sci. Tech. B. 10:1992;2681-2684.
13. Yoon S.F., Yang H., Rusli J.A., Zhang Q. J. Electron. Mater. 27:1998;44.
14. Serra C., Pascual E., Maass F., Bertran E., Esteve J. Daimond Rel. Mater. 1:1992;538-542.
15. Lee H., Ting J.M. Dia. Rel. Mater. 11(3-6):2002;1119-1123.