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Volumn 11, Issue 3-6, 2002, Pages 1119-1123
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DLC composite thin films by sputter deposition
a
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Author keywords
Composite; Diamond like carbon; Sputter deposition; Thin film
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Indexed keywords
COMPOSITE MATERIALS;
CORRELATION METHODS;
ELECTRIC CONDUCTIVITY;
ELECTROCHEMISTRY;
GROWTH (MATERIALS);
MICROANALYSIS;
MICROELECTRODES;
MICROSTRUCTURE;
MORPHOLOGY;
PLATINUM;
RAMAN SPECTROSCOPY;
SCANNING ELECTRON MICROSCOPY;
SPUTTER DEPOSITION;
STRESS ANALYSIS;
THIN FILMS;
TRANSMISSION ELECTRON MICROSCOPY;
COMPOSITE FILMS;
DIAMOND LIKE CARBON FILMS;
DIAMOND-LIKE CARBON;
FILM;
MECHANICAL PROPERTY;
SPUTTERING;
TRIBOLOGICAL DESIGN;
TRIBOLOGY;
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EID: 0036508082
PISSN: 09259635
EISSN: None
Source Type: Journal
DOI: 10.1016/S0925-9635(01)00615-X Document Type: Article |
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Times cited : (34)
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References (20)
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