Laser assisted nanofabrication

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 142-155

  Hong, M H ^a   Huang, S M ^a   Luk'yanchuk, B S ^a   Wang, Z B ^a   Lu, Y F ^a   Chong, T C ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

Author keywords

Laser irradiation; Mie scattering; Nanostructuring; Near field

Indexed keywords

ATOMIC FORCE MICROSCOPY; IRRADIATION; MASKS; NANOTECHNOLOGY; SURFACE PHENOMENA;

LASER ASSISTED NANOFABRICATION; MIE SCATTERING; SURFACE NANOPATTERNING;

PULSED LASER APPLICATIONS;

EID: 0344430217     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479236     Document Type: Conference Paper

References (21)

1. A. A. Gorbunov and W. Pompe, Phys. Status Solidi A 145, 333 (1994).
2. J. Jersch and K. Dickmann, Appl. Phys. Lett. 68, 868 (1996).
3. Y. F. Lu, Z. H. Mai, G. Qiu, and W.K. Chim, Appl. Phys. Lett. 75, 2359 (1999).
4. S. M. Huang, M.H. Hong, Y.F. Lu, B.S. Luk'yanchuk, W. D. Song, and T. C. Chong, J. Appl. Phys. 91, 3268 (2002).
5. S. M. Huang, M. H. Hong, B. S. Luk'yanchuk, Y. F. Lu, W. D. Song, and T. C. Chong, J. Vac. Sci. Technol. B 20, 1118 (2002).
6. J. Jersch, F. Demming, and K. Dickmann, Appl. Phys. A 64, 29 (1997).
7. B. S. Luk'yanchuk, Y. W. Zheng, Y. F. Lu: Proc. SPIE, vol. 4065, 576 (2000).
8. B. S. Luk'yanchuk, Y. W. Zheng, Y. F. Lu: Proc. SPIE, vol. 4423, 115 (2001).
9. B. S. Luk'yanchuk, Y. W. Zheng, Y. F. Lu: RIKEN Review, No. 43, 28 (2002).
10. P. Leiderer, J. Boneberg, V. Dobler, M. Mosbacher, H. -J. Münzer, N. Chaouti, J. Siegel, J. Solis, C. N. Afonso, T. Fourrier, G. Schrems, D. Bäuerle: Proc. SPIE, vol. 4065, 249 (2000).
11. B. S. Luk'yanchuk, M. Mosbacher, Y. W. Zheng, H. -J. Münzer, S. M. Huang, M. Bertsch, W. D. Song, Z. B. Wang, Y. F. Lu, O. Dubbers, J. Boneberg, P. Leiderer, M. H. Hong, T. C. Chong, Chapter 3 in: "Laser Cleaning", Ed. By B.S. Luk'yanchuk (World Scientific New Jersey, London, 2002), pp. 103-178.
12. M. Mosbacher, H. -J. Münzer, J. Zimmermman, J. Solis, J. Boneberg, P. Leiderer, Appl. Phys. A 72, 41 (2001).
13. Y. F. Lu, L. Zhang, W. D. Song, Y. W. Zheng, and B. S. Luk'yanchuk, JETP lett. 72, 457 (2000).
14. S. M. Huang, M. H. Hong, B. S. Luk'yanchuk, Y. W. Zheng, W. D. Song, Y. F. Lu and T. C. Chong, J. Appl. Phys. 92, 2495 (2000).
15. N. Arnold, Theoretical description of dry laser cleaning, EMRS Spring Meeting, Strasbourg, France, 2002 (to appear in Appl. Surf. Sci).
16. B. S. Luk'yanchuk, N. Arnold, S. M. Huang, and M. H. Hong, 3-Dimensional effects in dry laser cleaning. to appear in Appl. Phys. A, 2002.
17. L. D. Landau, E. M. Lifshitz and L. P. Pitaevskii, Electrodynamics of Continuous Media, Pergamon Press, New York, 1984.
18. Yu. A. Kravtsov, Yu. I. Orlov, Geometrical Optics of Inhomogeneous Media, Springer, Berlin, 1990.
19. M. V. Berry, C. Upstill, in Progress in optics, Vol. 18, E. Wolf ed., Elsevier, North-Holland, 1980.
20. Born, M., Wolf E., Principles of Optics, 7th Edition, (Camrbidge University Press, 1999).
21. Kerker M., Selected Papers on Light Scattering, Proc. SPIE, vol. 951 (Part One), (1989), see Section 4 "Optical Resonances".