Tertiarybutylhydrazine: a new precursor for the MOVPE of group III-nitrides

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Volumn 59, Issue 1-3, 1999, Pages 20-23

  Pohl, U W ^a   Moller C ^a   Knorr, K ^a   Richter, W ^a   Gottfriedsen, J ^a   Schumann, H ^a   Rademann, K ^b   Fielicke, A ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b HUMBOLDT UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; IONIZATION; MASS SPECTROMETRY; METALLORGANIC VAPOR PHASE EPITAXY; ORGANIC COMPOUNDS; PRESSURE MEASUREMENT; PYROLYSIS;

QUADRUPOLE MASS SPECTROMETRY; TERTIARYLBUTYLHYDRAZINE;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0344240216     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00406-1     Document Type: Article

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