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Volumn 18, Issue 3, 2002, Pages 313-322
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Statistical design of double EWMA controller
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Author keywords
Double EWMA (feedback) controller; Optimal discount factors; Process disturbance; Run by run process control; Single EWMA (feedback) controller; Stability conditions
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Indexed keywords
CLOSED LOOP CONTROL SYSTEMS;
FEEDBACK CONTROL;
MATHEMATICAL MODELS;
OPTIMIZATION;
PROCESS CONTROL;
SEMICONDUCTOR DEVICE MANUFACTURE;
STABILITY CRITERIA;
STATE SPACE METHODS;
WHITE NOISE;
EXPONENTIALLY WEIGHTED MOVING AVERAGE;
OPTIMAL DISCOUNT FACTORS;
PROCESS DISTURBANCE;
STABILITY CONDITIONS;
STATISTICAL METHODS;
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EID: 0036657777
PISSN: 15241904
EISSN: None
Source Type: Journal
DOI: 10.1002/asmb.476 Document Type: Article |
Times cited : (34)
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References (8)
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