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Volumn 39, Issue 1, 2000, Pages 272-274

Nanotribology of clean and oxide-covered silicon surfaces using atomic force microscopy

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ETCHING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDES; SEMICONDUCTING SILICON; SURFACE TREATMENT; WEAR OF MATERIALS;

CHEMICAL MECHANICAL PLANARIZATION; NANOMETER SCALE;

TRIBOLOGY;

EID: 0343953391 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.39.272 Document Type: Article

Times cited : (11)

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