Laser direct etching of silicon on oxide for rapid prototyping

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 49-51

  Mullenborn M ^a   Heschel, M ^a   Larsen, U D ^a   Dirac, H ^a   Bouwstra, S ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; ETCHING; LASER APPLICATIONS; MASKS; RAPID PROTOTYPING; SEMICONDUCTING SILICON;

LASER DIRECT ETCHING;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0030091831     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/009     Document Type: Article

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