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Volumn 3328, Issue , 1998, Pages 23-31
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Systematic design of microactuators using topology optimization
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Author keywords
Actuators; Finite element analysis; MicroElectroMechanical Systems (MEMS); Smart structures; Structural optimization; Thermal expansion; Topology optimization
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Indexed keywords
ACTUATORS;
COMPOSITE MICROMECHANICS;
CONCRETE BRIDGES;
DESIGN;
ELECTROMECHANICAL DEVICES;
FINITE ELEMENT METHOD;
INTELLIGENT STRUCTURES;
MECHATRONICS;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROMECHANICS;
OPTIMIZATION;
SHAPE OPTIMIZATION;
STIFFNESS;
STRUCTURAL DESIGN;
THERMAL EXPANSION;
THERMAL SPRAYING;
THERMAL STRESS;
TOPOLOGY;
ACTIVE MATERIALS;
DESIGN PROCEDURES;
FINITE ELEMENT ANALYSIS;
MEMS DESIGN;
MICRO ACTUATORS;
MICROELECTROMECHANICAL SYSTEMS (MEMS);
OUTPUT FORCE;
OUTPUT PERFORMANCE;
SMART STRUCTURES;
SYSTEMATIC DESIGN METHODS;
SYSTEMATIC DESIGNS;
TOPOLOGY OPTIMIZATION;
TOPOLOGY OPTIMIZATION METHOD;
WORK-PIECE (WP);
STRUCTURAL OPTIMIZATION;
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EID: 0343737240
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.320179 Document Type: Conference Paper |
Times cited : (11)
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References (13)
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