Improved performance of GaAs micromachined power sensor microsystem

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 241-246

  Lalinsky T ^a   Haščík, Š ^a   Mozolová, Ž ^a   Burian, E ^a   Drzik M ^b  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF CONSTRUCTION AND ARCHITECTURE   (Slovakia)

Author keywords

[No Author keywords available]

Indexed keywords

CANTILEVER BEAMS; COMPUTER SIMULATION; INTERFEROMETRY; LASER OPTICS; MESFET DEVICES; MICROMACHINING; SEMICONDUCTING GALLIUM ARSENIDE; THERMAL EFFECTS; THERMAL EXPANSION;

CANTILEVER BIMETALLIC EFFECT; DIFFERENTIAL THERMAL EXPANSION; LASER OPTICAL REFLECTANCE MEASUREMENT; MICROSCOPIC LASER OPTICAL INTERFEROMETRY; POWER SENSORS;

SENSORS;

EID: 0343496782     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00037-0     Document Type: Article

References (11)

1. Jaeggi D., Baltes H., Moser D. Thermoelectric AC power sensor by CMOS technology. IEEE Electron Device Lett. 13:1992;366-368.
2. Grňo L. Thermal wattmeter with direct power conversion. IEEE Trans. Instrum. Meas. 44:1995;377-385.
3. Lalinský T., Kuzmík J., Porges M., Haščík Š., Mozolová Ž., Grňo L. Monolithic GaAs MESFET power sensor microsystem. Electron. Lett. 31:1995;1914-1915.
4. R.A. Adey, Ph. Renaud, MICROSIM II, Simulation and Design of Microsystems and Microstructures, Computational Mechanics Publications, Southampton, UK, 1997, pp. 43-51.
5. Lalinský T., Haščík Š., Mozolová Ž., Kuzmík J., Hatzopoulos Z. GaAs power sensor microsystem technology and characterization. Sensors Mater. 10:1998;241-250.
6. Burian E., Pogany D., Lalinský T., Seliger N., Gornik E. Thermal simulation and characterization of GaAs micromachined power-sensor microsystems. Sensors and Actuators A. 68:1998;372-377.
7. Dehé A., Krozer V., Chen B., Hartnagel H.L. High-sensitivity microwave power sensor for GaAs-MMIC implementation. Electron. Lett. 32:1996;2149-2150.
8. Haščík Š., Lalinský T., Kuzmík J., Porges M., Mozolová Ž. Fabrication of thin GaAs cantilever beams for power sensor microsystem by RIE. Vacuum. 47:1996;1215-1217.
9. Š. Haščík, T. Lalinský, Ž. Mozolová, J. Kuzmík, Patterning of cantilevers for power sensor microsystem, Vacuum (1998) in press.
10. Van Herwaarden A.W., Van Duyn D.C., Groeneweg J. Small-size vacuum sensors based on silicon thermopiles. Sensors and Actuators A. 25-27:1991;565-569.
11. Gimzewski J.K., Gerber Ch., Meyer E., Schlittler R.R. Observation of a chemical reaction using a micromechanical sensor. Chem. Phys. Lett. 217:1994;589-594.