Power sensor microsystem technology and characterization

Sensors and Materials

Volumn 10, Issue 4, 1998, Pages 241-250

  Lalinský, Tibor ^a   Haščík, Štefan ^a   Mozolová, Želmíra ^a   Kuzmík, Ján ^a   Hatzopoulos, Zacharias ^b  

^a INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

Author keywords

Bulk micromachining; GaAs heterostructure layer design; GaAs MESFET; Power sensor; Reactive ion etching; Thermoconverter

Indexed keywords

EID: 0041179653     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

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