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Volumn 218, Issue 2, 2000, Pages 287-293

Growth and recrystallization of CeO2 thin films deposited on R-plane sapphire by off-axis RF sputtering

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLIZATION; EPITAXIAL GROWTH; GRAIN SIZE AND SHAPE; MORPHOLOGY; SAPPHIRE; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS; THIN FILMS;

EID: 0343390511     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00585-6     Document Type: Article
Times cited : (44)

References (13)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.