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Volumn 218, Issue 2, 2000, Pages 287-293
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Growth and recrystallization of CeO2 thin films deposited on R-plane sapphire by off-axis RF sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
CRYSTAL MICROSTRUCTURE;
CRYSTAL ORIENTATION;
CRYSTALLIZATION;
EPITAXIAL GROWTH;
GRAIN SIZE AND SHAPE;
MORPHOLOGY;
SAPPHIRE;
SPUTTER DEPOSITION;
SURFACE ROUGHNESS;
THERMAL EFFECTS;
THIN FILMS;
BUFFER LAYERS;
CERIA;
CERIUM COMPOUNDS;
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EID: 0343390511
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(00)00585-6 Document Type: Article |
Times cited : (44)
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References (13)
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