Composite germanium/C:H films prepared by DC unbalanced magnetron sputtering

Thin Solid Films

Volumn 351, Issue 1-2, 1999, Pages 151-157

  Biederman, H ^a   Stundzia V ^a   Slavinska D ^a   Zalman J ^a   Pesicka J ^a   Vanecek M ^b   Zemek, J ^b   Fukarek, W ^c  

^a CHARLES UNIVERSITY   (Czech Republic)

^b INSTITUTE OF PHYSICS   (Czech Republic)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Carbon; Composite; Germanium; Plasma processing and deposition

Indexed keywords

COMPOSITION; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRIC PROPERTIES; FILM PREPARATION; GERMANIUM; GERMANIUM ALLOYS; MAGNETRON SPUTTERING; REFRACTIVE INDEX; RUTHERFORD BACKSCATTERING SPECTROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION; PLANAR ELECTRODES COMPOSITE FILM CONFIGURATION;

METALLIC FILMS;

EID: 0343338284     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00303-X     Document Type: Article

References (24)

1. H. Biederman, P. Hlídek, J. Pešicka, V. Stundzia, Vacuum 47 (1996) 11.
2. H. Biederman, P. Hlídek, et al., J. Pešicka. Vacuum 47 (1996) 12.
3. H. Biederman, R.P. Howson, D. Slavínská, V. Stundzia, J. Zemek, Vacuum 48 (1997) 10.
4. H. Biederman, V. Stundzia, D. Slavínská, et al., Proc. IUPAC ISPC-13, 3 (1997) 1165.
5. N. Saito, T. Yamaguchi, I. Nakaaki, J. Appl. Phys. 78 (1995) 6.
6. N. Saito, I. Nakaaki, T. Yamaguchi, S. Yoshioka, S. Nakamura, Thin Solid Films 269 (1995) 69.
7. Z.T. Liu, J.Z. Zhu, N.K. Xu, X.L. Zheng, Jpn. J. Appl. Phys. 36 (1997) 3625.
8. M.F. Ebel, H. Ebel, M. Mander, et al., X-ray Spectrometry 21 (1992) 137.
9. R.K. Sadhir, H.E. Saunders, W.A. Byers, Polym. Eng. Sci. 33 (1993) 645.
10. M. Gazicki, J. Schalko, F. Olcaytug, M. Ebel, H. Ebel, J. Wernisch, H. Yasuda, J. Vac. Sci. Technol. A 12 (1994) 2.
11. M. Gazicki, M.J. Potrzebowski, J. Tyczkowski, J. Schalko, Thin Solid Films 258 (1995) 10.
12. M. Gazicki, H. Szymanowski, J. Tyczkowski, J. Schalko, F. Olcaytug, J. Vac. Sci. Technol. A 14 (1996) 5.
13. H. Biederman, V. Stundzia, D. Slavínská, J. Glosík, Vacuum 52 (1999) 415.
14. J.F. Moulder, W.F. Sticke, P.E. Sobol, K.D. Bomben, Handbook of X-ray Photoelectron Spectroscopy, Perkin-Elmer Co., Eden Prairie, 1992.
15. I.M. Band, Y. Kharitonov, M.B. Trzhaskovskaya, Atomic Data Nucl, Data Tables 23 (1979) 443.
16. S. Tanuma, C.J. Powel, D.R. Penn, Surf. Sci. 53 (1987) 31.
17. P. Jirícek, Czech. J. Phys. 44 (1994) 261.
18. M. Kumada, A. Masuda, T. Shimira, Jpn. J. Appl. Phys. 37 (1998) 1754.
19. J. Shinar, H.S. Wu, R. Shinar, H.R. Shanks, J. Appl. Phys 62 (1987) 808.
20. S. Kumar, H.J. Trohdal, Thin Solid Films, 193/194 (1990) 72.
21. M. Kumru, Thin Solid Films 198 (1991) 75.
22. T. Brace, I. Bello, J. Huang, W.M. Lau, M. High, V. Strnad, P. Panchhi, J. Appl. Phys 76 (1994) 552.
23. J. Tyczkowski, E. Odrobina, M. Gazicki, F. Olcaytug, J. Non-Cryst. Solids, 137/138 (1991) 875.
24. V. Stundzia, P. Bílková, H. Biederman, D. Slavínská, P. Hlídek, Vacuum 50 (1998) 23.