Wet etching of undercut sidewalls in {001}-silicon

Sensors and Actuators, A: Physical

Volumn 79, Issue 1, 2000, Pages 55-63

  Fruhauf J ^a   Hannemann, B ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; POTASSIUM COMPOUNDS;

POTASSIUM HYDROXIDE; UNDERCUT SIDEWALLS; WET ETCHING;

SEMICONDUCTING SILICON;

EID: 0342903379     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(98)00233-7     Document Type: Article

References (10)

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