SOI pressure sensor

Transducers '91

Volumn , Issue , 1991, Pages 181-184

  French, P J ^a   Muro, H ^a   Shinohara, T ^a   Nojiri, H ^a   Kaneko, H ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALS; OXIDES; SEMICONDUCTOR DEVICE MANUFACTURE - SILICON ON INSULATOR TECHNOLOGY; SENSORS - SILICON SENSORS;

ALKALI ETCHING; CAVITY OXIDATION; SILICON-ON-OXIDE PRESSURE SENSOR; SOI PRESSURE SENSOR;

PRESSURE TRANSDUCERS;

EID: 0026369862     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)