MOVPE growth optimization using computer supported Design of Experiments (DoE)

Physica Status Solidi (A) Applied Research

Volumn 180, Issue 1, 2000, Pages 109-114

  Alam, A ^a   Schon O ^a   Schineller, B ^a   Heuken, M ^a   Jurgensen H ^a  

^a AIXTRON AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARRIER CONCENTRATION; COMPUTER AIDED DESIGN; ELECTRIC VARIABLES MEASUREMENT; HETEROJUNCTIONS; NUCLEATION; OPTICAL VARIABLES MEASUREMENT; OPTIMIZATION; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM COMPOUNDS; SEMICONDUCTOR GROWTH; SEMICONDUCTOR QUANTUM WELLS;

COMPUTER SUPPORTED DESIGN OF EXPERIMENT; IN-SITU REFLECTOMETRY;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0342844332     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200007)180:1<109::AID-PSSA109>3.0.CO;2-Z     Document Type: Article

References (6)

1. S. NAKAMURA and G. FASOL, The Blue Laser Diode. Springer-Verlag, Berlin 1997.
2. M. DESCHLER, AIXTRON magazine Navigator, March 1999 (p. 25).
3. R. L. MASON, R. F. GUNST, and J. L. HESS, Statistical Design and Analysis of Experiments with Application to Engineering and Science, John Wiley & Sons, Inc., New York 1989.
4. M. LÜNENBÜRGER, H. PROTZMANN, M. HEUKEN, and H. JÜRGENSEN, phys. stat. sol. (a) 176, 727 (1999).
5. O. SCHOEN, B. SCHINELLER, M. HEUKEN, and R. BECCARD, J. Cryst. Growth 189/190, 335 (1998).
6. F. SCHULZE, J. BLÄSING, A. DIEZ, A. KROST, O. SCHÖN, A. ALAM, and M. HEUKEN, to be published at the ICMOVPE, Sapporo, Japan.