The quadratic finite element thermal analysis of silicon irradiated by a pulsed KrF excimer laser

Computational Materials Science

Volumn 17, Issue 2-4, 2000, Pages 409-413

  Nakamiya, Toshiyuki ^a   Ikegami, Tomoaki ^b   Ebihara, Kenji ^b  

^a TOKAI UNIVERSITY   (Japan)

^b KUMAMOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0342508551     PISSN: 09270256     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0927-0256(00)00062-8     Document Type: Article

References (13)

1. S.D. Brotherton, D.J. Mcculloch, J.P. Gowers, J.R. Ayres, M.J. Trainer, J. Appl. Phys. 82 (1997) 4086.
2. G.K. Giust, T.W. Sigmon, Appl. Phys. Lett. 70 (1997) 767.
3. D.B. Geohegan, A.A. Puretzky, G. Duscher, S.J. Pennycook, Mater. Res. Symp. Proc. 526 (1998) 47.
4. J.N. Reddy, An Introduction to the Finite Element Method, McGraw-Hill, New York, p. 13.
5. T. Nakamiya, K. Ebihara, Trans. IEE of Japan 108-A (1988) 443.
6. O.C. Zienkiewicz, K. Morgan, Finite Elements and Approximation, Wiley, New York, p. 164.
7. H.S. Carslaw, C. Jaeger, Conduction of Heat in Solids, Oxford University Press, Oxford, p. 78.
8. C.Y. Ho, R.W. Powell, P.E. Liley, J. Phys. Chem. Ref. Data 1 (1972) 394.
9. R.F. Wood, C.W. White, R.T. Young, Semiconductors and Semimetals, vol. 23, Academic Press, New York, p. 182.
10. E. Landi, P.G. Carey, T.W. Sigmon, IEEE Trans. Comp.-Aided Design 7 (1988) 205.
11. G.E. Jellison Jr., D.H. Lowndes, D.N. Mashburn, R.F. Wood, Phys. Rev. B 34 (1986) 2407.
12. D.R. Lide, CRC Handbook of Chemistry and Physics, CRC Press, Boca Raton, pp. 12-126.
13. J. Narayan, C.W. White, M.J. Aziz, B. Stritzker, A. Walthuis, J. Appl. Phys. 57 (1985) 564.