Fabrication of tunable InP/air-gap Fabry-Perot cavities by selective etching of InGaAs sacrificial layers

Physica Scripta T

Volumn 79, Issue , 1999, Pages 131-134

  Chitica, Nicolae ^a,b   Daleiden, Jürgen ^b   Bentell, Jonas ^b   André, Janos ^b   Strassner, Martin ^b   Greek, Staffan ^c   Pasquariello, Donato ^c   Karlsson, Mikael ^c   Gupta, Ram ^c   Hjort, Klas ^c  

^a INSTITUTE OF ATOMIC PHYSICS   (Romania)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^c UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CAVITY RESONATORS; ELECTRIC POTENTIAL; ETCHING; IRON COMPOUNDS; LEAKAGE CURRENTS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SEMICONDUCTING INDIUM GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE;

FABRY-PEROT CAVITIES; SELECTIVE ETCHING;

OPTICAL FILTERS;

EID: 0033366225     PISSN: 02811847     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (13)

1. Hjort, K. et al., Proc. MOEMS '97 International Conference on Optical MEMS and their applications, Nara-Japan, Nov. 18-21, 1997.
2. Ukita, H., Uenishi, Y. and Tanaka, H., Science 260, 786 (1993).
3. Wu, M. S., Vail, E. C., Li, G. S., Yuen, W. and Chang-Hasnain, C. J., Electron. Lett. 31, 1671 (1995).
4. Larson, M. C. and Harris Jr., J. S., Appl. Phys. Lett. 68, 891 (1996).
5. Chitica, N., Streubel, K. and Andre, J., Proc. Indium Phosphide and Related Materials, Cape Cod-USA, May 11-15, 1997, pp. 115.
6. Christenson, G. L. et al., IEEE Photon. Technol. Lett. 9, 725 (1997).
7. Riemenschneider, R. et al., Proc. SPIE Photonics West '98, San Jose (USA) Jan. 24-30, 3276 (1998).
8. Spisser, A. et al., Electron. Lett. 34, 435 (1998).
9. Viktorovitch, P. et al., LEOS Summer Topical Meeting MOEMS '98, July 20-22, 1998, Monterey, CA-USA.
10. Streubel, K., Rapp, S., Andre, J. and Chitica, N., Electron. Lett. 32, 1369 (1996).
11. Coldren, L A. and Corzine, S. W., "Diode Lasers and Photonic Integrated Circuits" (Wiley Series in Microwave and Optical Engineering 1995), p. 94.
12. Born, M. and Wolf, E., "Principles of Optics" (Pergamon, Oxford 1994).
13. Greek, S., Gupta, R. and Hjort, K., IEEE J. Microelectromech. Syst., in press.