Nanofabrication of magnetic tunnel junctions by using side-edge thin film deposition

Science and Technology of Advanced Materials

Volumn 4, Issue 4, 2003, Pages 347-352

  Niizeki, T ^a   Kubota, H ^a   Ando, Y ^a   Miyazaki, T ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Magnetic tunnel junction; Nanostructure; Single electron tunneling; Tunnel magnetoresistance

Indexed keywords

DEPOSITION; ELECTRON BEAM LITHOGRAPHY; ELECTRON TRANSPORT PROPERTIES; ELECTRON TUNNELING; ELECTROSTATICS; FABRICATION; INDUCTIVELY COUPLED PLASMA; MAGNETORESISTANCE; NANOSTRUCTURED MATERIALS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY;

ELECTRON TRANSPORT; SINGLE ELECTRON TUNNELING (SET);

TUNNEL JUNCTIONS;

EID: 0242657739     PISSN: 14686996     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.stam.2003.08.004     Document Type: Article

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