BAW and SAW sensors for In-situ analysis

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5050, Issue , 2003, Pages 81-91

  Sherrit, Stewart ^a   Bao, Xiaoqi Q ^a   Bar Cohen, Yoseph ^a   Chang, Zensheu ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Bulk Acoustic Waves; Microfluidics; Piezoelectric; RF interrogated sensors; Surface Acoustic Waves; Ultrasonic

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC IMPEDANCE MEASUREMENT; ACOUSTIC SURFACE WAVE DEVICES; ADSORPTION; BIOSENSORS; DESORPTION; ELASTICITY; PIEZOELECTRICITY; PRESSURE MEASUREMENT; REMOTE SENSING; SPACE RESEARCH; TEMPERATURE MEASUREMENT;

PLANETARY SAMPLE ANALYSIS;

CHEMICAL SENSORS;

EID: 0242610025     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.484252     Document Type: Conference Paper

References (34)

1. X. Q. Bao, W. Burkhard, V. V. Varadan and V. K. Varadan, "SAW Temperature Sensor and Remote Reading System" Proceeding of the IEEE International Symposium on Ultrasonics, pp. 583-585, 1987
2. V. V. Varadan, V. K. Varadan, X. Q. Bao, S. Ramanathan, D. Piscotty, "Wireless Passive IDT Strain Microsensor", Smart Materials and Structures, 6, pp. 745-751, 1997
3. A. Pohl, R. Steindl, L. Reindl, "The "Intelligent Tire" Utilizing Passive SAW Sensors- Measurement of Tire Friction", IEEE Trans. on Instrumentation and Measurement, 48, pp. 1041-1046, 1999
4. L. Reindl et al., (1998) " Theory and Application of Passive SAW Radio Transponders and Sensors" IEEE Trans. of UFFC, 45, pp. 1281-1292.
5. R.W. Cernosek, S.J. Martin, A.R. Hillman, H.L Bandy, "Comparison of the Lumped-Element and Transmission-Line models for the Thickness-Shear-Mode Quartz Resonator Sensors, IEEE Trans. on Ultrasonics, Ferroelectrics and Frequency Control, 45, 5, pp. 1399-1407, Sept., 1998
6. G. Sauerbrey, "Verwendung von Schwingquarzen sur Wägung Dünner Schichten und zur Mikrowägung -Translation - Use of vibrating quartz for weighing of thin layers and for micro weighing", Z. Physik, 155, pp. 206-222, 1959
7. S. Sherrit, V. Olazábal, J.M. Sansiñena, X. Bao, Z. Chang, Y. Bar-Cohen, "The use of Piezoelectric Resonators for the Characterization of Mechanical Properties of Polymers", Proceedings of the SPIE Smart Structures Conference, Vol. 4695, Paper No. 35, San Diego, CA., March 2002, SPIE
8. B.A. Auld, Acoustic Fields and Waves in Solids Vol. II, 1973
9. Susan L.Hietala, Vincent M. Hietala and Jeffrey Brinker, "Dual SAW Sensor Technique for Determining Mass and Modulus Change", IEEE Trans UFFC 48, pp. 262-267)
10. Kerstin Schroeder, Wolfgang Ecke, Rudolf Mueller, Reinhardt Willsch and Andrey Andreev, "A fibre Bragg grating refractometer", Meas. Sci. Technol. 12, pp. 757-764, 2001
11. Fleischer M, Simon E, Rumpel E, Ulmer H, Harbeck M, Wandel M, Fietzek C, Weimar U, Meixner H, "Detection of volatile compounds correlated to human diseases through breath analysis with chemical sensors", Sensors And Actuators B-Chemical, 83 (1-3), pp. 245-249, 2002
12. Vlasov Y, Legin A, Rudnitskaya A, "Cross-sensitivity evaluation of chemical sensors for electronic tongue: determination of heavy metal ions", Sensors And Actuators B-Chemical, 44 (1-3), pp. 532-537, 1997
13. Susan L.Hietala, Vincent M. Hietala and Jeffrey Brinker, "Dual SAW Sensor Technique for Determining Mass and Modulus Change", IEEE Trans UFFC 48, pp. 262-267)
14. D.S. Ballantine, R.M. White, S.J. Martin, A.J. Ricco, E.T. Zellers, G.C. Frye, and H. Wohltjen, Acoustic Wave Sensors: Theory Design and Physico-Chemical Applications, Academic Press, San Diego, 1997
15. W. Cheng, Y. Dong, and G. Feng, "A Multi-Resolution Wireless Force Sensing System Based upon a Passive SAW Device" IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 48, pp. 1438-1441, 2001
16. XCI Inc., San Jose, CA.
17. M. Nakazawa, T. Takemae, A. Miyahara, K. Matsuyama," A Study of Quartz Temperature Sensors Characterized by Ultralinear Frequency-Temperature Responses", IEEE Transactions On Sonics And Ultrasonics. Vol. Su-32., 6, pp. 828-834, 1985
18. M. Kuroiwa, Y. Shimamoto, Y. Yasuda, S. Wakamoto and M. Nakazawa," Hysteresis Characteristics Vs Relative Humidity For At-Cut Quartz Humidity Sensors", Proceedings of the IEEE Frequency Control Symposium, pp. 492-496, 2001
19. Hollinger, Richard D.; Tellakula, Anikumar R.: Li, C.-T.; Varadan, Vasundara V.; Varadan, Vijay K. "Wireless surface-acoustic-wave-based humidity sensor", Proc. SPIE Vol. 3876, p. 54-62, 8/1999
20. K. Kwon, J.W. Evans, "Viscosity changes of Li battery electrolytes and their long-term effect on the frequency of EQCM electrodes", Electrochemical And Solid State Letters 5 (3): A59-A61, 2002
21. T. NOMURA, T. YASUDA," Measurement Of Acoustic Properties Of Liquids Using SH-Type Surface Acoustic Waves", Proceedings of the IEEE Ultrasonics Symposium, pp. 307-310, 1990
22. R.J. Besson, J.J. Boy, B. Clotin, Y. Jinzaki, B.K. Sinha, and M. Valtlois, "A Dual-Mode Thickness-Shear Quartz Pressure Sensor". Proceedings of the IEEE Ultrasonics Symposium, pp485-493, 1991
23. C. L. Anderson." Acceleration Charge Sensitivity In At-Quartz Resonators", Proceedings of the IEEE Frequency Control Symposium, pp. 519-529, 1995
24. R. Clive Woods, Hoshi Kalami, and Brian Johnson, "Evaluation of a Novel Surface Acoustic Wave Gyroscope", IEEE Transactions On Ultrasonics, Ferroelectrics, And Frequency Control, 49, 1, pp. 136-141, 2002
25. Varadan, Vijay K.; Varadan, Vasundara V.; Bao, Xiao-Qi, "IDT, SAW, and MEMS sensors for measuring deflection, acceleration, and ice detection of aircraft", Proc. SPIE Vol. 3046, p. 209-219, Smart Structures and Materials 1997: Smart Electronics and MEMS, Vijay K. Varadan; Paul J. McWhorter; Eds., 6/1997
26. Y Kim, D. E. Pierce, "Sensing Of Organic Vapor Adsorption On Gold Using A Temperature Insensitive Microbalance", Proceedings of the IEEE Frequency Control Symposium, pp. 1001-1003, 1999
27. I.V. Anisimkin, V. I. Anisimkin, F.S.Hickernell, "Novel Multi-Channel Saw Tool For The Analysis Of Gas-Phase Adsorption" Proceedings of the IEEE Ultrasonics Symposium, pp. 331-335, 2001
28. J.S. Schoenwald, M. Kendig and Dennis Tench, "Resonating Disk Sensor For Conductive Ink Cure Monitoring", Proceedings of the IEEE Ultrasonics Symposium, pp. 631-633, 1989
29. Laik B, Poizot P, Tarascon JM,"The electrochemical quartz crystal microbalance as a means for studying the reactivity of Cu2O toward lithium", Journal Of The Electrochemical Society 149 (3): A251-A255 MAR 2002
30. Chou SF, Hsu WL, Hwang JM, Chen CY, "Determination of alpha-fetoprotein in human serum by a quartz crystal microbalance-based immunosensor", Clinical Chemistry, 48 (6): 913-918 Part 1 JUN 2002
31. Chen YK, Xiao D, Yang XH, Shao GQ, "Development of a piezoelectric immunosensor for hepatitis B surface antigen", Chen ZZ, Wang KM, Chemical Journal Of Chinese Universities-Chinese, 23 (6): 1044-1046 JUN 2002
32. Muramatsu H, Kim JM, Chang SM, "Quartz-crystal sensors for biosensing and chemical analysis", Analytical And Bioanalytical Chemistry, 372 (2): 314-321 JAN 2002
33. N. Barie, M. Rapp, H. Sigrist, The Use Of Dextran As An Intermediate Layer: A New Approach Towards Saw Based Biosensors", Proceedings of the IEEE Frequency Control Symposium, pp. 997-1000, 1999
34. J. Kondoh, Y. Matsui And S. Shiokawa, "SH-Saw Biosensor Based On Ph Change", Proceedings of the IEEE Ultrasonics Symposium, pp. 337-340, 1997