Novel multi-channel SAW tool for the analysis of gas-phase adsorption

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2001, Pages 331-335

  Anisimkin, I V ^a   Anisimkin, V I ^a   Hickernell, F S ^b  

^a INSTITUTE OF RADIO ENGINEERING AND ELECTRONICS   (Russian Federation)

^b UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC DELAY LINES; ACOUSTIC WAVE VELOCITY; ANISOTROPY; ELASTICITY; GAS ADSORPTION; LITHIUM NIOBATE; MASKS; OPTIMIZATION; SUBSTRATES;

INTERDIGITAL TRANSDUCERS; PHOTOMASKS; PIEZOELECTRIC SUBSTRATE; TEMPERATURE SENSITIVITY;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0035732572     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2001.991636     Document Type: Article

References (6)

1. Isothermal measurements and thermal deposition of organic vapors using SAW devices
2. Surface acoustic wave method: New analytical capabilities
3. Integrated array of gas sensors
4. Ultrasonic characterization of the kinetics of water adsorption in hydrogels
5. Effect of humidity on SAW devices
6. Adsorption of water molecules on fused quartz