Characterization of diamond sonic micronozzles and microtube

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2034-2037

  Mammana, S S ^a   Salvadori, M C ^a   Kawakita, K ^b   Pereira, M T ^b   Cattani, M ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

DIAMOND FILMS; ETCHING; HARDNESS; NEODYMIUM LASERS; NOZZLES; REYNOLDS NUMBER; SCANNING TUNNELING MICROSCOPY; TEMPERATURE; THERMAL CONDUCTIVITY; THERMAL EXPANSION; TUBES (COMPONENTS); TUNGSTEN;

DIAMOND SONIC MICRONOZZLES; DIAMOND SONIC MICROTUBES; ELECTROCHEMICAL ETCHING; PASSIVE GAS FLOW CONTROLLERS;

FLOWMETERS;

EID: 0242593774     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1603287     Document Type: Article

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