Diamond flow controller microtubes

Journal of Micromechanics and Microengineering

Volumn 12, Issue 2, 2002, Pages 108-110

  Silva, S ^a   Salvadori, M C ^a   Kawakita, K ^b   Pereira, M T ^b   Galvao R M ^a   Cattani, M ^a  

^a UNIVERSITY OF SÃO PAULO   (Brazil)

^b Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

ACIDS; DIAMOND FILMS; ETCHING; FLOW CONTROL; FLOW MEASUREMENT; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; TUBES (COMPONENTS); TUNGSTEN; WIRE;

ACID ETCHING; CHOKING CONDITIONS; DIAMOND MICROTUBES; FLOW CONTROLLERS; TUNGSTEN WIRES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036466336     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/12/2/302     Document Type: Article

References (15)

1. Micro-electro-mechanical-systems (MEMS) and fluid flows
2. Microfabrication of submicron nozzles in silicon nitride
3. Diamond tubes and fibers
4. Laminar forced convection in a circular tube with constant heat flux and slip flow
5. A high-resolution silicon monolithic nozzle array for inkjet printing
6. The far-reaching nature of microtube technology
7. Turbulent forced convection in microtubes
8. Heat transfer in microtubes with viscous dissioation
9. CVD diamond wires and tubes
10. The current status of CVD diamond applications and prospects for the future
11. Fidelity of diamond replica on silicon substrate
12. Plasma-assisted chemical vapor deposition in a tunable microwave cavity
13. Gaseous flow in microtubes at arbitrary knudsen numbers