Uncooled micro-bolometer based on amorphous germanium film

Journal of Non-Crystalline Solids

Volumn 329, Issue 1-3, 2003, Pages 179-183

  Torres, A ^a   Kosarev, A ^a   Garcia Cruz M L ^a   Ambrosio, R ^a  

^a INSTITUTO NACIONAL DE ASTROFÍSICA   (Mexico)

Author keywords

[No Author keywords available]

Indexed keywords

BOLOMETERS; CURRENT VOLTAGE CHARACTERISTICS; GERMANIUM; HEAT RESISTANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICON WAFERS;

MICROBOLOMETERS;

AMORPHOUS FILMS;

EID: 0242525745     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2003.08.037     Document Type: Conference Paper

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