Polymeric waveguide fabrication based on mold technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4991, Issue , 2003, Pages 366-373

  Sugihara, Okihiro ^a   Okamoto, Naomichi ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

Hot emboss technique; Mold technology; Polymer optical waveguide; Simultaneous formation of waveguide and elements; Waveguide elements

Indexed keywords

MOLDS; OPTICAL WAVEGUIDES; OPTOELECTRONIC DEVICES; PHOTOLITHOGRAPHY; REACTIVE ION ETCHING;

HOT EMBOSSING; POLYMERIC WAVEGUIDES;

ORGANIC POLYMERS;

EID: 0242524562     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479006     Document Type: Conference Paper

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