Simultaneous fabrication of optical channel waveguides and out-of-plane branching mirrors from a polymeric slab structure

Applied Optics

Volumn 36, Issue 30, 1997, Pages 7700-7707

  Kagami, Manabu ^a   Hasegawa, Kazuo ^a   Ito, Hiroshi ^a  

^a Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HEAT TREATMENT; LIGHT PROPAGATION; MIRRORS; OPTICAL PROPERTIES; OPTICAL VARIABLES MEASUREMENT; OPTICAL WAVEGUIDES; PLASTIC FILMS; POLYMETHYL METHACRYLATES; PROTECTIVE COATINGS; RADIATION; REACTIVE ION ETCHING; REFLECTION;

BRANCHING; ETCH INHIBITING FILM REMOVAL; MASK PATTERNING; PROPAGATION LOSS; SIDEWALL FLATTENING;

OPTICAL FIBER FABRICATION;

EID: 0031250161     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.007700     Document Type: Article

References (12)

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