Simple, three-dimensional microfabrication of electrodeposited structures

Angewandte Chemie - International Edition

Volumn 42, Issue 11, 2003, Pages 1262-1265

  LaVan, David A ^b   George, Paul M ^b   Langer, Robert ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Electrodeposition; Nickel; Photolithography; Polypyrrole; Self assembly

Indexed keywords

NICKEL; PHOTOLITHOGRAPHY; POLYPYRROLES; STRUCTURE (COMPOSITION);

MICROFLUIDIC VASCULAR NETWORKS;

ELECTRODEPOSITION;

NICKEL; POLYPYRROLE;

ARTICLE; DEVICE; ELECTROPLATING INDUSTRY; FILM; MATERIALS; SURFACE PROPERTY; TECHNIQUE;

EID: 0242500380     PISSN: 14337851     EISSN: None     Source Type: Journal    
DOI: 10.1002/anie.200390323     Document Type: Article

References (17)

1. A. Kumar, N. L. Abbott, H. A. Biebuyck, E. Kim, G. M. Whitesides, Acc. Chem. Res. 1995, 28, 219.
2. E. Kim, Y. Xia, G. M. Whitesides, J. Am. Chem. Soc. 1996, 118, 5722.
3. D. C. Duffy, J. C. McDonald, O. J. A. Schueller, G. M. Whitesides, Anal. Chem. 1998, 70, 4974.
4. B.-H. Jo, D. J. Beebe, Proc. SPIE-Int. Soc. Opt. Eng. 1999, 3877, 222.
5. O. Hofmann, G. Voirin, P. Niedermann, A. Manz, Anal. Chem. 2002, 74, 5243.
6. L. Griscom, P. Degenaar, B. LePioufle, E. Tamiya, H. Fujita, Jpn. J. Appl. Phys. Part 1 2001, 40, 5485.
7. A. F. Diaz, K. K. Kanazawa, G. P. Gardini, J. Chem. Soc. Chem. Commun. 1979, 635.
8. G. Sabouraud, S. Sadki, N. Brodie, Chem. Soc. Rev. 2000, 29, 283.
9. L. F. Warren, D. P. Anderson, J. Electrochem. Soc. 1987, 134, 101.
10. A. N. Zelikin, D. M. Lynn, J. Farhadi, I. Martin, V. Shastri, R. Langer, Angew. Chem. 2002, 114, 149; Angew. Chem. Int. Ed. 2002, 41, 141.
11. A. N. Zelikin, D. M. Lynn, J. Farhadi, I. Martin, V. Shastri, R. Langer, Angew. Chem. 2002, 114, 149; Angew. Chem. Int. Ed. 2002, 41, 141.
12. M. E. G. Lyons, Adv. Chem. Phys. 1996, 94, 297.
13. E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner, D. Münchmeyer, Microelectron. Eng. 1986, 4, 35.
14. H.-J. J. Yeh, J. S. Smith, Sens. Mater. 1994, 6, 319.
15. J. S. Smith (Alien Technology Corporation), US Pat. 6291896 2001.
16. T. E. Buchheit, D. A. LaVan, J. R. Michael, T. R. Christenson, S. D. Leith, Metall. Mater. Trans. A 2002, 33, 539.
17. W. H. Safranek, The Properties of Electrodeposited Metals and Alloys: a Handbook, 2nd ed., American Electroplaters and Surface Finishers Society, Orlando, FL, 1986.