Effects of Grain Boundary Structure and Chemistry on Electrical Activity in Polycrystalline Silicon

Solid State Phenomena

Volumn 93, Issue , 2003, Pages 333-338

  Tsurekawa, Sadahiro ^a   Watanabe, Tadao ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Electrical Activity; Electron Beam Induced Current; Grain Boundary; Passivation; Silicon

Indexed keywords

ELECTRON BEAMS; GRAIN BOUNDARIES; MICROSTRUCTURE; OXIDATION; POLYCRYSTALLINE MATERIALS;

ELECTRON BEAM INDUCED CURRENTS (EBIC);

SILICON;

EID: 0242496280     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.93.333     Document Type: Conference Paper

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