Fabrication of SnO2 particle-layer on the glass substrate using electrospray pyrolysis method and the gas sensitivity for H2

Sensors and Actuators, B: Chemical

Volumn 96, Issue 1-2, 2003, Pages 133-138

  Matsushima, Yuta ^a   Nemoto, Yukie ^a,b   Yamazaki, Tsutomu ^a   Maeda, Kazuyuki ^a   Suzuki, Takeyuki ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

^b SEMICONDUCTOR ENERGY LABORATORY CO LTD   (Japan)

Author keywords

Electrospray; Fine particle; Gas sensor; Particle layer; Tin dioxide

Indexed keywords

DEPOSITION; GLASS; PYROLYSIS; SCANNING ELECTRON MICROSCOPY; SPRAYING; SUBSTRATES;

ELECTROSPRAY PYROLYSIS;

TIN COMPOUNDS;

EID: 0242415883     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00514-8     Document Type: Article

References (27)

1. 2 thin films. J. Electrochem. Soc. 123:1976;1889-1893.
2. Shanthi E., Dutta V., Banerjee A., Chopra K.L. Electrical and optical properties of undoped and antimony-doped tin oxide films. J. Appl. Phys. 51:1980;6243-6251.
3. 2 layers on glass substrates using a spraying method. Thin Solid Films. 77:1981;67-80.
4. Shanthi E., Banerjee A., Chopra K.L. Dopant effects in sprayed tin oxide films. Thin Solid Films. 88:1982;93-100.
5. 2 thin films. J. Cryst. Growth. 194:1998;369-373.
6. Kojima M., Kato H., Gatto M. Blackening of tin oxide thin films heavily doped with antimony. Philos. Mag. B. 68:1993;215-222.
7. 2/n-Si solar cells. Appl. Phys. Lett. 35:1979;266-268.
8. Okuyama K., Lenggoro I.W., Tagami N., Tamaki S., Tohge N. Preparation of ZnS and CdS fine particles with different particle sizes by a spray-pyrolysis method. J. Mater. Sci. 32:1997;1229-1237.
9. Rulison A.J., Flagan R.C. Synthesis of yttria powders by electrospray pyrolysis. J. Am. Ceram. Soc. 77:1994;3244-3250.
10. 3 using electrostatic spray pyrolysis (ESP). Solid State Ionics. 68:1994;5-7.
11. 4 by electrospraying. J. Aerosol Sci. 25:1994;1229-1235.
12. 2 thin film cathodes for rechargeable lithium battery by electrostatic spray pyrolysis. Solid State Ionics. 80:1995;1-4.
13. 2 films fabricated using the electrostatic spray deposition (ESD) technique. J. Mater. Chem. 6:1996;765-771.
14. Stelzer N.H.J., Schoonman J. Synthesis of terbia-doped yttria-stabilized zirconia thin films by electrostatic spray deposition (ESD). J. Mater. Synth. Process. 4:1996;429-438.
15. Chen C.H., Nord-Varhaug K., Schoonman J. Coating of yttria-stabilized zirconia (YSZ) thin films on gadolinia-doped ceria (GCO) by the electrostatic spray deposition (ESD) technique. J. Mater. Synth. Process. 4:1996;189-194.
16. Chen C.H., Kelder E.M., Jak M.J.G., Schoonman J. Electrostatic spray deposition of thin layers of cathode materials for lithium battery. Solid State Ionics. 86-88:1996;1301-1306.
17. 2 thin layers prepared by electrostatic spray deposition. J. Mater. Sci. 31:1996;5437-5442.
18. Chen C.H., Kelder E.M., Schoonman J. Electrode and solid electrolyte thin films for secondary lithium-ion batteries. J. Power Sources. 68:1997;377-380.
19. 3 thin layers prepared by electrostatic spray deposition. Sens. Actuators B. 47:1998;189-193.
20. 2 thin films. Thin Solid Films. 342:1999;35-41.
21. Zaouk D., Zaatar Y., Khoury A., Llinares C., Charles J.-P., Bechara J. Electrical and optical properties of pyrolytically electrostatic sprayed fluorine-doped tin-oxide: dependence on substrate-temperature and substrate-nozzle distance. J. Appl. Phys. 87:2000;7539-7543.
22. 2) thin film by electrostatic spray pyrolysis. Microelectron. Eng. 51-52:2000;627-631.
23. 2. Denki Kagaku. 58:1990;1143-1148.
24. Cloupeau M., Prunet-Foch B. Electrostatic spraying of liquids in cone-jet mode. J. Electrostat. 22:1989;135-159.
25. Gañán-Calvo A.M., Dávila J., Barrero A. Current and droplet size in the electrospraying of liquids. Scaling laws. J. Aerosol Sci. 28:1997;249-275.
26. x films prepared by ion-beam sputtering. J. Mater. Sci. 23:1988;1106-1111.
27. Suzuki T., Yamazaki T., Hayashi K., Noma T. High gas sensitivity of tin oxide ultrathin films deposited on glasses and alumina substrates. J. Mater. Sci. 26:1991;6419-6422.