Fabrication of tin oxide (SnO2) thin film by electrostatic spray pyrolysis

Microelectronic Engineering

Volumn 51, Issue , 2000, Pages 627-631

  Zaouk, D ^a,b   Zaatar, Y ^a,c   Khoury, A ^a   Llinares, C ^b   Charles, J P ^c   Bechara, J ^a  

^a Dept Phys Fac Sci II L   (Lebanon)

^b UNIV MONTPELLIER   (France)

^c UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CONDUCTIVITY OF SOLIDS; POLYCRYSTALLINE MATERIALS; PYROLYSIS; SEMICONDUCTING TIN COMPOUNDS;

ELECTROSTATIC SPRAY PYROLYSIS; TIN OXIDE;

THIN FILMS;

EID: 0033726815     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00526-2     Document Type: Article

References (6)

1. Basu S., Dutta A. Phys. Stat. Sol. (a). 136:1993;276.
2. Stjerna B., Olsson E., Granqvist C.G. J. Appl. Phys. 76:(6):1994;3797.
3. Siefert W. Thin Solid Films. 120:1984;275.
4. van der Pauw L.J. Philips Res. Rep. 13:1958;1.
5. Balasubramanian N., Subrahmanyam A. J. Phys. D. 22:1989;206.
6. Mattox D.M. Thin Solid Films. 124:1985;3.