Stacking Faults in 3C-SiC Relax Lattice Deformation

Materials Science Forum

Volumn 433-436, Issue , 2003, Pages 273-276

  Hatta, Naoki ^a   Yagi, Kuniaki ^a   Kawahara, Takamitsu ^a   Nagasawa, Hiroyuki ^a  

^a HOYA Adv Semiconductor Technologies   (Japan)

Author keywords

3C SiC; Lattice Deformation; Stacking Fault; Warp

Indexed keywords

EPITAXIAL GROWTH; IMAGING TECHNIQUES; STACKING FAULTS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

LATTICE DEFORMATION;

SILICON CARBIDE;

EID: 0242413747     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.433-436.273     Document Type: Conference Paper

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