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Volumn 18, Issue 11, 2003, Pages 973-977

Analysis of the thin-oxide growth kinetic equation

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ERROR ANALYSIS; KINETIC THEORY; MATHEMATICAL MODELS; MATHEMATICAL TRANSFORMATIONS; OXIDATION; ULTRATHIN FILMS;

EID: 0242410139     PISSN: 02681242     EISSN: None     Source Type: Journal    
DOI: 10.1088/0268-1242/18/11/312     Document Type: Article
Times cited : (5)

References (6)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.