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Volumn 18, Issue 11, 2003, Pages 973-977
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Analysis of the thin-oxide growth kinetic equation
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Author keywords
[No Author keywords available]
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Indexed keywords
APPROXIMATION THEORY;
ERROR ANALYSIS;
KINETIC THEORY;
MATHEMATICAL MODELS;
MATHEMATICAL TRANSFORMATIONS;
OXIDATION;
ULTRATHIN FILMS;
GROWTH RATES;
KINETIC EQUATIONS;
SEMICONDUCTOR GROWTH;
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EID: 0242410139
PISSN: 02681242
EISSN: None
Source Type: Journal
DOI: 10.1088/0268-1242/18/11/312 Document Type: Article |
Times cited : (5)
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References (6)
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